| DC Field | Value | Language |
|---|
| dc.contributor.author | Sirota, V. V. | - |
| dc.contributor.author | Zaitsev, S. V. | - |
| dc.contributor.author | Prokhorenkov, D. S | - |
| dc.contributor.author | Limarenko, М. V. | - |
| dc.contributor.author | Skiba, А. A. | - |
| dc.contributor.author | Kovaleva, M. G. | - |
| dc.date.accessioned | 2024-12-24T13:19:40Z | - |
| dc.date.available | 2024-12-24T13:19:40Z | - |
| dc.date.issued | 2023 | - |
| dc.identifier.citation | Detonation Technology in Producing Metal-Ceramic Powder Targets for Magnetron Sputtering / V.V. Sirota, S.V. Zaitsev, D.S. Prokhorenkov [et al.] // Russian Engineering Research. - 2023. - Vol.43, №6.-P. 735-738. - Doi: 10.3103/S1068798X23060230. - Refer.: p. 738. | ru |
| dc.identifier.uri | http://dspace.bsu.edu.ru/handle/123456789/64221 | - |
| dc.description.abstract | The authors of the article propose an innovative approach to the manufacture of flat and cylindrical composite metal-ceramic targets (cathodes) for magnetron sputtering: the use of high-frequency multi-chamber detonation accelerators | ru |
| dc.language.iso | en | ru |
| dc.subject | technique | ru |
| dc.subject | metal processing | ru |
| dc.subject | multichamber detonation device | ru |
| dc.subject | detonation spraying | ru |
| dc.subject | multicomponent cathode | ru |
| dc.subject | target | ru |
| dc.subject | magnetron sputtering | ru |
| dc.title | Detonation Technology in Producing Metal-Ceramic Powder Targets for Magnetron Sputtering | ru |
| dc.type | Article | ru |
| Appears in Collections: | Статьи из периодических изданий и сборников (на иностранных языках) = Articles from periodicals and collections (in foreign languages)
|
